cyberTECHNOLOGIES Product Range
VANTAGE 2
A compact profilometer specially designed for the use in production and clean rooms.
The cyberSCAN VANTAGE 2 is a non-contact surface metrology system. It combines high resolution confocal sensor technology with a x- and y-translation stage. The system can measure large areas up to 200 mm with maximum x-, y-, z-resolution.
All electronic components are integrated into a robust housing, no cables or external controllers are required. The system is connected with a single USB cable to PC or workstation. The proprietary and user friendly cyberTECHNOLOGIES Software offers sophisticated surface metrology analyses and automated measurement routines.
CT 100
Compact and flexible non-contact profilometer
The CT 100 is a compact, high resolution non-contact profilometer. The main components of the system are a white light sensor and a x-, y-motion system on a granite platform. The chromatic white light sensors combine high accuracy and high measurement speed.
The sensors are available with a resolution down to 3 nm and measurement range up to 12 mm. The system can scan a maximum area of 150 mm x 150 mm. The unique cyberTECHNOLOGIES Software offers sophisticated surface metrology analysis and automated measurement routines.
CT 300
Non-contact profilometer for large areas available with a variety of sensors
The CT 300 is a non-contact profilometer with a 315 mm x-, y-motion system. It can handle up 12” wafers or other large substrates and parts.
Using a chromatic white light sensor and a data collection rate of up to 20 kHz the inspection time is minimized. The confocal microscope and 3D white light interferometer sensors offer unmatched resolution in z-direction down to 0.1 nm. With our multi-sensor technology several sensor heads can be mounted simultaneously including infrared interferometers for measureing wafer thickness.
CT 350T / CT 250T
Double-sided non-contact metrology system for accurate thickness measurement
The CT 350T is a non-contact double-sided optical profilometer with a 300 mm x-, y- scanning stage. The top- and bottom-sensor are mounted on highly accurate z-axes with 100 mm travel. The double sided autofocus function allows to measure even extremely bowed or warped parts.
Both sensors collect height data synchronized with x-, y- encoder signals and are aligned axially in order to ensure accurate differential thickness measurements. The software generates 2D profiles and 3D maps simultaneously from the top and the bottom surface and calculates the corresponding total thickness profile or map.
The motion system uses fast and accurate magnetic linear motors. The inspection time is minimized by triggering the chromatic white light sensors at a data rate of 4 kHz. With an adapter plate on the stage aperture the system can be used as a standard optical surface profilometer which makes the CT 350T the most versatile surface and thickness measurement system. The system is also available in a smaller version as CT 250T with 200 mm travel ideally for 8” wafers or substrates and solar wafers.
CT 350S
A non-contact surface profilometer with ultra precise motion system.
The CT 350S is a non-contact profilometer with a 350 mm x-, y-scanning stage and a closed loop 200 mm z-axis. All 3 axis use air bearings and magnetic linear motors. The system is based on a massive granite construction with a vibration isolated floor stand. The xy motion system offers exceptional performance with an error of less than 100 nm. During the scanning process the z-axis can follow the shape of the part. The height reading is a combination of the calibrated z encoder signal and the sensor height. This allows the system to achieve a very high resolution over the entire z-axis range of 200 mm.
The CT 350S was originally designed and is ideal for measuring precision optics. However, contour measurements, step height, roughness and other 2D and 3D analyses are excellent examples of further applications. The sensors are available with a resolution down to 3 nm.
CT 600S
A non-contact profilometer for scanning large and heavy parts with unmatched accuracy.
The CT 600S is a non-contact profilometer with a 600 mm x-, y-motion system. The gantry design with air bearings is moving the sensor-camera assembly while the sample is fixed on the granite platform. This motion system allows to calibrate the system flatness independent of the sample weight.
The CT 600S reaches a total accuracy of 0.3 microns over the entire travel of 600 mm.
The CT 600S is ideal for measuring flatness on large samples, as well as step height, roughness and other 2D and 3D analysis. Circular and ellipsoidal scans minimize the inspection time on round parts.
The sensors are mounted on an automated z-axis and are available with a resolution down to 3 nm and a measurement range up to 12 mm.
INLINE Solutions
Production integrated solutions for an automated non-contact scanning
The cyberTECHNOLOGIES scanning platform is also available as an integrated solution to provide automated non-contact scanning of any surface directly in the production process. It combines high resolution sensor technology, a computer controlled motion system, a handling device and data analysis software to a unique in-line non-contact profilometer.
A large variety of sensors with different resolutions, ranges and working principles is available to solve the most demanding measurement tasks. The flexible software platform allows to create a custom-specific applications with customized analysis, data input and result output.
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