About KLA Instruments™

KLA Instruments is a growing surface metrology group within KLA that caters to not just inspection and metrology needs in semiconductor fabs, but also provides material measurement solutions for research labs in academia and industry. Our portfolio of tools include stylus and optical profilers, nanomechanical testers, benchtop sheet resistance tools, thin film reflectometers and specialized defect inspection systems.

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Nanoindenters

Wide-range Nanomechanical testers

Nanomechanical testers from KLA Instruments™ provide precise, reliable and repeatable measurements of hardness, Young’s modulus, and other mechanical properties to help you explore new materials, reduce product failures and accelerate your time-to-market. We offer nanoindentation tools that range from easy-to-use to a high performance nanoindenter to the industry’s highest performance and most versatile nano tensile tester.

KLA Instruments Catalogue

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Nanoindenters

Nanomechanical testers from KLA Instruments™provide precise, reliable and repeatable measurements of hardness, Young’s modulus, and other mechanical properties to help you explore new materials, reduce product failures and accelerate your time-to-market. We offer nanoindentation tools that range from easy-to-use to a high performance nanoindenter to the industry’s highest performance and most versatile nano tensile tester.

iMicro Nanoindenter

Flexible, user-friendly nanoindenter for modulus, hardness (Oliver-Pharr analysis, ISO 14577), storage and loss modulus, and universal testing. Capable of exerting up to 1N of force to test hard materials at higher loads and larger depths. Fitted with optional actuators for testing of soft materials, tribology, lateral force and other measurements requiring the determination of force and displacement along two axes.

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iNano®Nanoindenter

Flexible, user-friendly, low-force nanoindenter that can perform a wide range of nanomechanical tests on metals, ceramics, composites, thin films, coatings, polymers, biomaterials and gels. Capable of exerting up to 50mN force to test thin films and soft materials.

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Nano Indenter®G200X Nanoindenter

Industry-leading nanoindenter with a flexible, user-friendly interface for nanoscale mechanical testing. The Nano Indenter G200X uses high-speed controller electronics, an upgraded user interface and advanced InView™ software to enable a variety of optional advanced application modules: frequency-specific testing, quantitative scratch and wear testing, integrated probe-based imaging, high-temperature testing and custom test protocols.

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InSEM® HT Nanoindenter

Highest performance nanoindenter for testing the mechanical properties of small volumes of material under vacuum at temperatures up to 800°C. Real-time deformation data adds to the understanding of material performance at elevated temperatures.

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NanoFlip Nanoindenter

Compact, flexible in situ nanomechanical tester for in situ testing inside scanning electron microscopes or gloveboxes or on benchtops, under either ambient or vacuum conditions.

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