GBS HIGH SPEED Smart WLI System
GBScanner – 3D Profiler for fast and reliable roughness measurements
The smartWLI GBScanner is a fast optical profiler with sub nanometer topography reproducibility. By using a motorized 3-axis tripod for scanning and positioning with a measuring volume of 100 x 100 x 50 mm³ (xyz) an extension up to 300 x 300 x 100 mm², the system can be used for the measurement of medium seize samples. The 3d data will be evaluated in MountainsMap and allows automated push button scan and data evaluations using customized evaluation macros.
Using coherence scanning (white-light) interferometry to measure roughness and microgeometries
Coherence scanning (white-light) interferometry provide a much higher resolution than competitive optical 3d measuring principles as confocal microscopy, focus variation, chromatic confocal sensors, fringe projection or laser triangulation sensors. As microscopical optical measuring principle the GBScanner can be configurated using interference objectives with magnification from 2.5x up to 115x. Structures starting from lateral seize of app. 0.3 µm can be resolved. The upper limit is several mm² for single scans and several cm² for stitched areas.